LAUSR

With the development of fast electron sensitive cameras, a wide range of diffraction-based techniques has recently been developed for 4D-STEM [1], many of these techniques can also be employed in conventional SEMs and FIB/SEMs by adding a fast camera inside the sample chamber [2]. We built a diffraction sub-stage for SEMs and FIB/SEMs which can acquire fast and with the beam scan synchronized diffraction patterns in transmission. This sub-stage can also tilt and shift the sample piezodriven in 6 dimensions and adjust the camera length by moving the camera relative to the sample with a linear stage. This system is simpler and more flexible compared to dedicated transmission electron microscopes, has a larger sample chamber and less operating costs. Additionally, the low acceleration voltages (0.5kV to 30kV) of SEMs and FIB/SEMs result in stronger scattering as well as reduced knockon damage compared to higher voltages. With their good electron optics, SEMs and FIB/SEMs are an excellent platform for investigating beam sensitive materials like hybrid inorganic/organic systems, 2D materials, FIB lamellas and other thin samples with diffraction based methods. We present our plug and play sub-stage that can easily be transferred between SEMs and FIB/SEMs in more detail and show a summary of our results.