LAUSR

Atom probe tomography (APT) is a powerful technique for highest resolution 3D materials analysis. However, sample preparation for APT is challenging. It is a time-consuming process that involves multiple steps and often different preparation tools which makes it prone to failure and sample loss. With the LaserFIB we present and introduce an all-in-one solution to speed up APT sample preparation and increase its success rate. The LaserFIB features a femtosecond (fs) laser that has been integrated on a ZEISS Crossbeam [1]. This combination enables high-resolution SEM imaging and FIB patterning as well as site-specific sample structuring and preparation using the laser. All laser processing is done in a separate chamber extending the airlock to avoid contamination of the FIB-SEM chamber components (Fig. 1).