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Uncovering the Mechanism for Electron-beam Manipulation of Dopants in Silicon

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Covalently bound impurity atoms in crystal lattices can be manipulated via the elastic backscattering of probe electrons from nuclei using the atomically focused electron irradiation of a scanning transmission electron… Click to show full abstract

Covalently bound impurity atoms in crystal lattices can be manipulated via the elastic backscattering of probe electrons from nuclei using the atomically focused electron irradiation of a scanning transmission electron microscope [1]. Early work discovered the atomistic mechanism for manipulation in graphene: out-of-plane dynamics of a carbon atom neighboring an impurity, leading to what can be conceived of as a beam-controlled direct exchange process [2]. Most of the work in this newly emerging area has focused on lattice impurities in single-layer graphene, initially incidental silicon impurities [3,4] but later also phosphorus dopants [5].

Keywords: manipulation; mechanism electron; uncovering mechanism; electron; beam; mechanism

Journal Title: Microscopy and Microanalysis
Year Published: 2020

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