LAUSR

We propose an all-optical miniaturized multigas simultaneous detection photoacoustic (PA) sensor, which is primarily composed of a copper tube, a silica cantilever, and four single-mode fibers. Three single-mode fibers are used as excitation fibers to transmit lasers of different wavelengths, and the remaining one is used as a probe fiber. The volumes of the PA cell (PAC) and the sensor are 36 μL and 71 cubic millimeters, respectively. A laser photoacoustic spectroscopy (PAS) system, using the all-optical miniaturized PA sensor as a detector, 1532.8, 1576.3, and 1653.7 nm distributed feedback (DFB) lasers as the excitation sources for acetylene (C2H2), hydrogen sulfide (H2S), and methane (CH4) gases, and a high-speed spectrometer as a demodulator, has been developed for multigas simultaneous measurements. The minimum detection limits of 4.8, 162, and 16.6 parts per billion (ppb) have been achieved for C2H2, H2S, and CH4, respectively, with an integration time of 100 s. The reported sensor shows a potential for high-sensitivity multigas simultaneous measurements in cubic millimeter-scale space.