Photo from academic.microsoft.com
SiO2 constitutes one of the most widely used dielectric materials in the microelectronics, packaging, and optical industries. Therefore, the development of new processes to deposit SiO2 at low temp... Click to show full abstract
SiO2 constitutes one of the most widely used dielectric materials in the microelectronics, packaging, and optical industries. Therefore, the development of new processes to deposit SiO2 at low temp...
Keywords:
enhanced spatial;
plasma;
sio2;
spatial chemical;
atmospheric plasma;
plasma enhanced
Journal Title: Chemistry of Materials
Year Published: 2020
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!
Journal Title: Chemistry of Materials
Year Published: 2020
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!