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Electron Beam Patterning of Metal–Organic Frameworks

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Development in patterning technique of metal–organic frameworks (MOFs) will facilitate their integration in microelectronics, but controlling the structure of MOFs at the nanoscale remains a major ... Click to show full abstract

Development in patterning technique of metal–organic frameworks (MOFs) will facilitate their integration in microelectronics, but controlling the structure of MOFs at the nanoscale remains a major ...

Keywords: patterning metal; organic frameworks; beam patterning; electron beam; metal organic

Journal Title: Chemistry of Materials
Year Published: 2021

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