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We present the full investigation of the atomic layer deposition (ALD) of a mixed rhenium–aluminum oxide, namely ReAl2O3CH3, a material with tunable resistance, comprising the building unit of cond... Click to show full abstract
We present the full investigation of the atomic layer deposition (ALD) of a mixed rhenium–aluminum oxide, namely ReAl2O3CH3, a material with tunable resistance, comprising the building unit of cond...
Keywords:
unsaturated hydrocarbons;
hydrogen surface;
hydrocarbons hydrogen;
chemistry;
ald mixed;
formation unsaturated
Journal Title: Chemistry of Materials
Year Published: 2019
Link to full text (if available)
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Journal Title: Chemistry of Materials
Year Published: 2019
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!