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Formation, Stability, and Annihilation of the Stitched Morphology in Block Copolymer Thin Films

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The directed self-assembly of block copolymer thin films offers promise for next-generation lithography, providing access to small feature dimensions for electronic devices. Defective assembly, whe... Click to show full abstract

The directed self-assembly of block copolymer thin films offers promise for next-generation lithography, providing access to small feature dimensions for electronic devices. Defective assembly, whe...

Keywords: copolymer thin; thin films; formation stability; block copolymer

Journal Title: Macromolecules
Year Published: 2020

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