LAUSR

Curved fluidic channels with a circular cross-section play an important role in biology, chemistry, and medicine. However, in nanofluidics, a problem that is largely unsolved is the lack of an effective fabrication method for curved circular nanotubes (10-1000 nm). In this work, an electron-beam-induced self-assembly process was applied to achieve fine curved nanostructures for the realization of nanofluidic devices. The diameter of the tube could be precisely controlled by an atomic layer deposition process. Fluid transported through the nanochannels was verified and characterized using a dark-field microscope under an optical diffraction limit size. The fluid flow demonstrates that the liquid's evaporation (vapor diffusion) in the nanochannel generates compressed vapor, which pumps the liquid and pushes it forward, resulting in a directional flow behavior in the ∼100 nm radius of tubes. This phenomenon could provide a useful platform for the development of diverse nanofluidic devices.