LAUSR

Focused electron beam induced deposition using the heteroleptic complex (η3-C3H5)Ru(CO)3Br as a precursor resulted in deposition of material with Ru content of 23 at%. TEM images indicated a nanogranular structure of pure Ru nanocrystals, embedded into a matrix containing carbon, oxygen and bromine. The deposits were purified by annealing in a reactive 98% N2 / 2% H2 atmosphere at 300 ºC, resulting in reduction of contaminants and an increase of Ru content to 83 at%. Although a significant 79% volume loss was found, the shrinkage was observed mostly for vertical thickness (around 75%). Lateral dimensions decreased but much less significantly (around 9%). Deposition results, in conjunction with previous gas phase and condensed phase surface studies on the electron-induced reactions of (η3-C3H5)Ru(CO)3Br, provide insight into the behavior of allyl, carbonyl and bromide ligands under identical electron beam irradiation.