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All-inorganic flexible Ba0.67Sr0.33TiO3 thin films with excellent dielectric properties over a wide range of frequencies.

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With rapid advances in flexible electronics and communication devices, flexible dielectric capacitors exhibiting high permittivity, low loss, and large electric-field tunability over a wide frequency range have attracted increasing attention.… Click to show full abstract

With rapid advances in flexible electronics and communication devices, flexible dielectric capacitors exhibiting high permittivity, low loss, and large electric-field tunability over a wide frequency range have attracted increasing attention. Here, a large-scale Ba0.67Sr0.33TiO3 (BST) dielectric thin film sandwiched between SrRuO3 (SRO) bottom electrode and Pt top electrode is fabricated on a flexible mica substrate. The mica/SRO/BST/Pt capacitor exhibits a dielectric constant (εr') of over 1200, a loss tangent [tan(δ)] as low as 0.16, and a tunability of 67% at low frequencies around 10 kHz. Simultaneously, the capacitor can retain an εr' of 540 and a tan(δ) of 0.07 at microwave frequencies, e.g., 18.6 GHz. Moreover, even when the capacitor is bent to a small radius of 5 mm or undergoes 12000 bending cycles (at 5 mm radius), almost no deterioration in εr', tan(δ), and tunability is observed. The excellent dielectricity and mechanical flexibility and durability endow the mica/SRO/BST/Pt capacitor with huge potential for flexible electronic and microwave applications.

Keywords: ba0 67sr0; inorganic flexible; range; flexible ba0; 67sr0 33tio3

Journal Title: ACS applied materials & interfaces
Year Published: 2019

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