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Monolayer MoS2 Enabled Single-Crystalline Growth of AlN on Si(100) Using Low-Temperature Helicon Sputtering

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Growing a single-crystalline film on a substrate relies on the compatibility of crystal symmetry and lattice constant between the two materials. Such limitations can be circumvented by introducing ... Click to show full abstract

Growing a single-crystalline film on a substrate relies on the compatibility of crystal symmetry and lattice constant between the two materials. Such limitations can be circumvented by introducing ...

Keywords: monolayer mos2; single crystalline; mos2 enabled; crystalline growth; crystalline; enabled single

Journal Title: ACS Applied Nano Materials
Year Published: 2019

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