LAUSR

Nanomechanical resonators can serve as ultrasensitive, miniaturized force probes. While vertical structures such as nanopillars are ideal for this purpose, transducing their motion is challenging. Pillar-based photonic crystals (PhCs) offer a potential solution by integrating optical transduction within the pillars. However, achieving high-quality PhCs is hindered by inefficient vertical light confinement. Here, we present a full-silicon photonic crystal cavity based on nanopillars as a platform for applications in force sensing and biosensing areas. Its unit cell consists of a silicon pillar with a larger diameter at its top portion than at the bottom, which allows vertical light confinement and an energy band gap in the near-infrared range for transverse-magnetic polarization. We experimentally demonstrate optical cavities with Q factors exceeding 103, constructed by inserting a defect within a periodic arrangement of this type of pillars. Each nanopillar naturally behaves as a nanomechanical cantilever, making the fabricated geometries excellent optomechanical (OM) photonic crystal cavities in which the mechanical motion of each nanopillar composing the cavity can be optically transduced. These geometries display enhanced mechanical properties, cost-effectiveness, integration possibilities, and scalability. They also present an alternative in front of the widely used suspended Si beam OM cavities made on silicon-on-insulator substrates.