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Submicrometer Nanostructure-Based RGB Filters for CMOS Image Sensors

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Digital color imaging relies on spectral filters on top of a pixelated sensor, such as a CMOS image sensor. An important parameter of imaging devices is their resolution, which depends… Click to show full abstract

Digital color imaging relies on spectral filters on top of a pixelated sensor, such as a CMOS image sensor. An important parameter of imaging devices is their resolution, which depends on the size of the pixels. For many applications, a high resolution is desirable, consequently requiring small spectral filters. Dielectric nanostructures, due to their resonant behavior and its tunability, offer the possibility to be assembled into flexible and miniature spectral filters, which could potentially replace conventional pigmented and dye-based color filters. In this paper, we demonstrate the generation of transmissive structural colors based on uniform-height amorphous silicon nanostructures. We optimize the structures for the primary RGB colors and report the construction of submicrometer RGB filter arrays for a pixel size down to 0.5 ?m.

Keywords: spectral filters; nanostructure based; image; cmos image; submicrometer nanostructure; rgb

Journal Title: ACS Photonics
Year Published: 2019

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