LAUSR

Oxygen (O2) sensing in trace amounts and mixed gas is essential in many types of industries. Semiconductor sensors have proven to be invaluable tools for the O2 measurements in a wide concentration range, but the sensors are only able to quantify O2 in a concentration range of subppm, thus far, especially in mixed gas. We present in this paper a new concept for O2 sensing with incomparable sensitivity using IGZO-films with oxygen vacancy-based conducting filaments (CFs). O2 sensing relies on rupturing of the CFs, and the proposed device quickly recovers to the initial state using a pulse of 0.6 V/90 μs after the sensing. The proposed device has a high sensitivity of 14 even at an O2 concentration of 500 ppb, a detection limit of 150 ppb for O2 at RT, and excellent selectivity for O2 in mixed gas, which is remarkable compared to other gas sensors. The proposed device can be widely used in gas sensors especially for detecting O2 at a low ppb level, which is due to excellent sensing characteristics.