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A flexible microsystem capable of controlled motion and actuation by wireless power transfer

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Microscale systems that can combine multiple functionalities, such as untethered motion, actuation and communication, could be of use in a variety of applications from robotics to drug delivery. However, these… Click to show full abstract

Microscale systems that can combine multiple functionalities, such as untethered motion, actuation and communication, could be of use in a variety of applications from robotics to drug delivery. However, these systems require both rigid and flexible components—including microelectronic circuits, engines, actuators, sensors, controllers and power supplies—to be integrated on a single platform. Here, we report a flexible microsystem that is capable of controlled locomotion and actuation, and is driven by wireless power transfer. The microsystem uses two tube-shaped catalytic micro-engines that are connected via a flat polymeric structure. A square coil is integrated into the platform, which enables wireless energy transfer via inductive coupling. As a result, the catalytic engines can be locally heated and the direction of motion controlled. Our platform can also integrate light-emitting diodes and a thermoresponsive micro-arm that can be used to perform grasp and release tasks. A flexible microsystem that has an integrated coil to enable wireless energy transfer via inductive coupling can offer controlled locomotion using two catalytic micro-engines and controlled actuation using thermoresponsive micro-arms.

Keywords: flexible microsystem; motion; microsystem; power; transfer; actuation

Journal Title: Nature Electronics
Year Published: 2020

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