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Monolithic silicon nitride electro-optic modulator enabled by optically-assisted poling

Electro-optic (EO) modulation is a key functionality to have on-chip. However, achieving a notable linear EO effect in stoichiometric silicon nitride has been a persistent challenge due to the material’s… Click to show full abstract

Electro-optic (EO) modulation is a key functionality to have on-chip. However, achieving a notable linear EO effect in stoichiometric silicon nitride has been a persistent challenge due to the material’s intrinsic properties. Recent advancements revealed that the displacement of thermally excited charge carriers under a high electric field induces a second-order nonlinearity in silicon nitride, thus enabling the linear EO effect in this platform regardless of the material’s inversion symmetry. In this work, we introduce optically-assisted poling of a silicon nitride microring resonator, removing the need for high-temperature processing of the device. The optical stimulation of charges avoids the technical constraints due to elevated temperature. By optimizing the poling process, we experimentally obtain a long-term effective second-order nonlinearity χeff(2)\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${\chi }_{{{{\rm{eff}}}}}^{(2)}$$\end{document} of 1.218 pm/V. Additionally, we measure the high-speed EO response of the modulator, showing a bandwidth of 4 GHz, only limited by the quality factor of the microring resonator. This work goes towards the implementation of monolithic, compact silicon nitride EO modulators, a necessary component for high-density integrated optical signal processing. The high-speed manipulation of light using the Pockels effect is a missing building block in photonic integrated chips based on amorphous materials. This work demonstrates a process for inducing a longlasting inscribed electric field responsible for an effective Pockels effect in amorphous silicon nitride electro-optic modulators at room temperature.

Keywords: nitride electro; optically assisted; electro optic; assisted poling; silicon; silicon nitride

Journal Title: Communications Physics
Year Published: 2024

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