Morphology of 〈111〉-oriented 3C–SiC films was transformed from mosaic to whisker to cauliflower-like with the increased flow rate (f) of hexametyldisilane (HMDS) in the process of laser chemical vapor deposition… Click to show full abstract
Morphology of 〈111〉-oriented 3C–SiC films was transformed from mosaic to whisker to cauliflower-like with the increased flow rate (f) of hexametyldisilane (HMDS) in the process of laser chemical vapor deposition (LCVD).
Keywords:
morphology controlling;
controlling 111;
flow rate;
sic films;
111 sic
Journal Title: RSC Advances
Year Published: 2019
Link to full text (if available)
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Journal Title: RSC Advances
Year Published: 2019
Link to full text (if available)
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recommendations!