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Cationic compositional effects on the bias-stress stabilities of thin film transistors using In–Ga–Zn–O channels prepared by atomic layer deposition

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Cationic compositional effects of amorphous In–Ga–Zn–O (a-IGZO) prepared by atomic layer deposition (ALD) were strategically investigated for thin film transistor applications. Click to show full abstract

Cationic compositional effects of amorphous In–Ga–Zn–O (a-IGZO) prepared by atomic layer deposition (ALD) were strategically investigated for thin film transistor applications.

Keywords: prepared atomic; cationic compositional; thin film; atomic layer; layer deposition; compositional effects

Journal Title: Journal of Materials Chemistry C
Year Published: 2019

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