A highly ordered and damage-free microscale Ge inverted pyramid array is fabricated by HF-free metal-assisted chemical etching. The inverted pyramid exhibits significant broadband antireflection properties in the mid-infrared region. Click to show full abstract
A highly ordered and damage-free microscale Ge inverted pyramid array is fabricated by HF-free metal-assisted chemical etching. The inverted pyramid exhibits significant broadband antireflection properties in the mid-infrared region.
               
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