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A highly ordered and damage-free Ge inverted pyramid array structure for broadband antireflection in the mid-infrared

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A highly ordered and damage-free microscale Ge inverted pyramid array is fabricated by HF-free metal-assisted chemical etching. The inverted pyramid exhibits significant broadband antireflection properties in the mid-infrared region. Click to show full abstract

A highly ordered and damage-free microscale Ge inverted pyramid array is fabricated by HF-free metal-assisted chemical etching. The inverted pyramid exhibits significant broadband antireflection properties in the mid-infrared region.

Keywords: inverted pyramid; highly ordered; ordered damage; broadband antireflection; damage free; pyramid array

Journal Title: Journal of Materials Chemistry C
Year Published: 2021

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