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Quantum chemical calculation and growth process of Ga2O3 grown via TEGa under different oxygen sources in MOCVD

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Ga2O3, a fourth-generation ultrawide-bandgap semiconductor material, offers a broad range of potential applications in automotive electronics, electrical devices, and other high-power electronic domains. Metal–organic chemical vapor deposition (MOCVD) is an... Click to show full abstract

Ga2O3, a fourth-generation ultrawide-bandgap semiconductor material, offers a broad range of potential applications in automotive electronics, electrical devices, and other high-power electronic domains. Metal–organic chemical vapor deposition (MOCVD) is an...

Keywords: chemical calculation; ga2o3 grown; process ga2o3; growth process; calculation growth; quantum chemical

Journal Title: CrystEngComm
Year Published: 2023

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