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β-Ga₂O₃: Ultralow loss and low permittivity dielectric ceramics for high-frequency packaging substrate

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As the core carrier of integrated circuits, packaging substrate usually responds in time to the evolution of electronic products. Among which, ceramic substrate materials are desired to have excellent dielectric... Click to show full abstract

As the core carrier of integrated circuits, packaging substrate usually responds in time to the evolution of electronic products. Among which, ceramic substrate materials are desired to have excellent dielectric...

Keywords: ultralow loss; permittivity dielectric; low permittivity; packaging substrate; substrate; loss low

Journal Title: Inorganic Chemistry Frontiers
Year Published: 2023

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