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AlN interlayer-induced reduction of dislocation density in the AlGaN epilayer

The emerging ultrawide-bandgap AlGaN alloy system holds promise for the development of advanced materials in the next generation of power semiconductor and UV optoelectronic devices. Within this context, heterostructures based... Click to show full abstract

The emerging ultrawide-bandgap AlGaN alloy system holds promise for the development of advanced materials in the next generation of power semiconductor and UV optoelectronic devices. Within this context, heterostructures based...

Keywords: reduction dislocation; aln interlayer; interlayer induced; density algan; induced reduction; dislocation density

Journal Title: CrystEngComm
Year Published: 2024

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