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Scheduling Semiconductor Wafer Fabrication Using a New Fuzzy Association Classification Rules Based on Dynamic Fuzzy Partition

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This paper proposes a dynamic fuzzy partition method of attribute domain suitable for the scheduling problem of Semiconductor wafer fabrication (SWF). Then, based on the above partition method, this paper… Click to show full abstract

This paper proposes a dynamic fuzzy partition method of attribute domain suitable for the scheduling problem of Semiconductor wafer fabrication (SWF). Then, based on the above partition method, this paper gives a new Fuzzy association classification rules (FACRs) for scheduling SWF. Also, this paper presents a corresponding simple mining method used to obtain the effective FACRs based on the Apriori algorithm. Furthermore, a Harmony search (HS) algorithm is designed to determine the rule parameters including the minimum fuzzy support and the total number of linguistic values of each condition attribute for the simple fuzzy partition. At last, computational simulations and comparisons based on the practical data are provided. It is shown that the proposed FACRs can generate better results for almost all problem instances.

Keywords: fuzzy partition; semiconductor wafer; wafer fabrication; partition; new fuzzy; dynamic fuzzy

Journal Title: Chinese Journal of Electronics
Year Published: 2017

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