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A single-step ductile dicing process capable of manufacturing optical quality facets in lithium niobate (LiNbO3) ridge waveguides with an average surface roughness of 0.29 nm is reported. This result is… Click to show full abstract
A single-step ductile dicing process capable of manufacturing optical quality facets in lithium niobate (LiNbO3) ridge waveguides with an average surface roughness of 0.29 nm is reported. This result is comparable with surface roughnesses achieved by lapping and polishing and represents an order of magnitude improvement over the prior state of the art in LiNbO3 waveguide facet dicing.
Keywords:
linbo3 ridge;
surface roughness;
surface;
step;
ductile dicing;
linbo3
Journal Title: Electronics Letters
Year Published: 2017
Link to full text (if available)
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Journal Title: Electronics Letters
Year Published: 2017
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!