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Fabrication and measurement of 3D LPF based on coaxial TSV

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The implementation of mainstream passive low-pass filters (LPFs) remains a challenge to satisfy the requirements of small size and compatibility with standard CMOS process. Fortunately, the emerging technology of through-silicon… Click to show full abstract

The implementation of mainstream passive low-pass filters (LPFs) remains a challenge to satisfy the requirements of small size and compatibility with standard CMOS process. Fortunately, the emerging technology of through-silicon via (TSV) offers a possible solution to this issue by developing 3D LPF architecture. A 3D LPF based on coaxial TSV is exploited by fabrication and measurement. The measurement result shows good agreement with that obtained by finite element method.

Keywords: fabrication measurement; lpf based; measurement; based coaxial; tsv; coaxial tsv

Journal Title: Electronics Letters
Year Published: 2019

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