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Correlation between the plasma self-organization areas (also known as ionization zones or spokes) and the ground state/metastable atoms behavior during magnetron sputtering glow discharge is investigated. High-power impulse magnetron sputtering… Click to show full abstract
Correlation between the plasma self-organization areas (also known as ionization zones or spokes) and the ground state/metastable atoms behavior during magnetron sputtering glow discharge is investigated. High-power impulse magnetron sputtering case is considered. For this purpose, the imaging of the ground states atomic Ti(3d24s2 a3F2), Ti+(3d2(3F)4s a4F3/2) and metastable Ar(3s23p54s (3P2)) is performed using laser-induced fluorescence. Results indicate a correlation between the studied Ti+ atomic density and the spoke dynamics. A qualitative model for the spoke-assisted magnetron sputtering is proposed, taking into account spoke formation, strong electron excitation in plasma, and other inherent phenomena of the sputtering discharge.
Journal Title: Applied Physics Letters
Year Published: 2017
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