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Surface diffusion measurements of In on InGaAs enabled by droplet epitaxy

Surface diffusion is a critical parameter for non-equilibrium growth techniques such as molecular beam epitaxy. However, very little is known about diffusion rates of individual cations in a mixed cation… Click to show full abstract

Surface diffusion is a critical parameter for non-equilibrium growth techniques such as molecular beam epitaxy. However, very little is known about diffusion rates of individual cations in a mixed cation material. Using droplet epitaxy as the growth technique, we isolate the diffusivity prefactor (D0) and activation energy (EA) of indium on the surface of In0.53Ga0.47As/InP(100). We report two regimes of indium diffusivity under As2-rich conditions: above and below the droplet deposition temperature of 300 °C, corresponding to a change in surface reconstruction. We also discuss methods of extracting the indium diffusion parameters on metal-rich surfaces using droplet epitaxy and nucleation theory. The obtained diffusion parameters are compared to previous work in the literature and could be employed to optimize growth conditions for non-equilibrium crystal growth.

Keywords: surface diffusion; droplet epitaxy; growth; diffusion

Journal Title: Journal of Applied Physics
Year Published: 2017

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