LAUSR

The plasma sheath above a rectangular trench has been experimentally characterized as the trench width is varied in a radio frequency (rf) plasma discharge for two different rf powers giving two different sets of plasma parameters. Measurements were made using the positions and all six normal mode frequencies of two dust particles floating just inside the sheath edge above the center of the trench. We find that sheath overlap occurs when the trench width ≲ 3 s 0 for a trench depth ≈0.7s0, where s0 is the planar sheath width. The electric field gradient inside the sheath edge increases with rf power.