LAUSR

Defocus and astigmatism can lead to blurred images and poor resolution. This paper presents a simplified method for focusing and astigmatism correction of a scanning electron microscope (SEM). The method consists of two steps. In the first step, the fast Fourier transform (FFT) of the SEM image is performed and the FFT is subsequently processed with a threshold to achieve a suitable result. In the second step, the threshold FFT is used for ellipse fitting to determine the presence of defocus and astigmatism. The proposed method clearly provides the relationships between the defocus, the astigmatism and the direction of stretching of the FFT, and it can determine the astigmatism in a single image. Experimental studies are conducted to demonstrate the validity of the proposed method.