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Annealing effects on hydrogenated diamond NOR logic circuits

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Here, hydrogenated diamond (H-diamond) NOR logic circuits composed of two p-type enhancement-mode (E-mode) metal-oxide-semiconductor field-effect-transistors (MOSFETs) and a load resistor are fabricated and characterized. The fabrication process and the annealing… Click to show full abstract

Here, hydrogenated diamond (H-diamond) NOR logic circuits composed of two p-type enhancement-mode (E-mode) metal-oxide-semiconductor field-effect-transistors (MOSFETs) and a load resistor are fabricated and characterized. The fabrication process and the annealing effect on the electrical properties of the NOR logic circuit are demonstrated. There are distinct logical characteristics for the as-received and 300 °C annealed NOR logic circuits. When one or both input voltages for the E-mode MOSFETs are −10.0 V and “high” signals, output voltages respond 0 V and “low” signals. Instead, when both input voltages are 0 V and “low” signals, output voltage responds −10.0 V and a “high” signal. After annealing at 400 °C, the NOR logical characteristics are damaged, which is possibly attributed to the degradation of the H-diamond MOSFETs.

Keywords: effects hydrogenated; logic circuits; diamond; annealing effects; diamond logic; hydrogenated diamond

Journal Title: Applied Physics Letters
Year Published: 2018

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