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Hole mobility in the ultra-thin-body junctionless germanium-on-insulator p-channel metal-oxide-semiconductor field-effect transistors

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Junctionless Germanium-on-insulator (GOI) p-channel metal-oxide-semiconductor field-effect transistors (MOSFETs) have been realized with an ultra-thin-body (UTB) channel of down to 6 nm. The hole m... Click to show full abstract

Junctionless Germanium-on-insulator (GOI) p-channel metal-oxide-semiconductor field-effect transistors (MOSFETs) have been realized with an ultra-thin-body (UTB) channel of down to 6 nm. The hole m...

Keywords: channel metal; germanium insulator; oxide semiconductor; metal oxide; junctionless germanium; channel

Journal Title: Applied Physics Letters
Year Published: 2019

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