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Measurement of the electron energy distribution in moving striations at low gas pressures

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The time-resolved Electron Energy Distribution Functions (EEDFs) have been measured at different phases of moving striations in a positive column of DC discharge in argon gas. A very low gas… Click to show full abstract

The time-resolved Electron Energy Distribution Functions (EEDFs) have been measured at different phases of moving striations in a positive column of DC discharge in argon gas. A very low gas pressure of 10 mTorr, a high energy resolution (to resolve the low energy part of the EEDF), and the dynamic range up to 3–4 orders of magnitude (to resolve the EEDF tail) with a temporal resolution of 2.5 μs distinguish our work from previous publications. The measured EEDFs reveal drastic changes in time of their low energy parts with the formation of a low energy peak. The observed EEDF dynamics is explained in the framework of nonlocal electron kinetics as electric field reversals and the trapping of low-energy electrons in potential wells propagating with striation along the discharge tube. The formation of the low energy peak in the EEDF is similar to that in rf capacitive and inductive discharges at low gas pressures where the low-energy electrons are trapped in the potential well created by the ambipolar electric field and cannot penetrate into the areas of electron heating by strong rf electric fields.The time-resolved Electron Energy Distribution Functions (EEDFs) have been measured at different phases of moving striations in a positive column of DC discharge in argon gas. A very low gas pressure of 10 mTorr, a high energy resolution (to resolve the low energy part of the EEDF), and the dynamic range up to 3–4 orders of magnitude (to resolve the EEDF tail) with a temporal resolution of 2.5 μs distinguish our work from previous publications. The measured EEDFs reveal drastic changes in time of their low energy parts with the formation of a low energy peak. The observed EEDF dynamics is explained in the framework of nonlocal electron kinetics as electric field reversals and the trapping of low-energy electrons in potential wells propagating with striation along the discharge tube. The formation of the low energy peak in the EEDF is similar to that in rf capacitive and inductive discharges at low gas pressures where the low-energy electrons are trapped in the potential well created by the ambipolar elect...

Keywords: energy distribution; low gas; energy; electron energy; low energy

Journal Title: Physics of Plasmas
Year Published: 2019

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