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Transmorphic epitaxial growth of AlN nucleation layers on SiC substrates for high-breakdown thin GaN transistors

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Interfaces containing misfit dislocations deteriorate electronic properties of heteroepitaxial wide bandgap III-nitride semiconductors grown on foreign substrates, as a result of lattice and therma... Click to show full abstract

Interfaces containing misfit dislocations deteriorate electronic properties of heteroepitaxial wide bandgap III-nitride semiconductors grown on foreign substrates, as a result of lattice and therma...

Keywords: epitaxial growth; aln nucleation; layers sic; growth aln; nucleation layers; transmorphic epitaxial

Journal Title: Applied Physics Letters
Year Published: 2019

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