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The rapid thermal annealing process is a key technology to control the parameters of the resonant tunneling diode (RTD) and to achieve high performance for the device. In this paper,… Click to show full abstract
The rapid thermal annealing process is a key technology to control the parameters of the resonant tunneling diode (RTD) and to achieve high performance for the device. In this paper, the rapid ther...
Keywords:
annealing process;
rapid thermal;
diode rtd;
thermal annealing;
tunneling diode;
resonant tunneling
Journal Title: AIP Advances
Year Published: 2020
Link to full text (if available)
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Journal Title: AIP Advances
Year Published: 2020
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!