LAUSR

The effect of high temperature annealing (HTA) on crystalline quality improvement of h-BN films grown on sapphire substrates has been investigated. It is found that BN grown using conventional molecular beam epitaxy is disordered due to the growth temperature below 1000 °C. By annealing at a temperature of 1700 °C, thermodynamically stable crystalline h-BN could be obtained at wafer scale, where diffusion of atoms in the as-grown BN film is enhanced and the structural defect density decreases. The crystalline h-BN has been confirmed by x-ray diffraction, Raman scattering, and atomic force microscopy measurements. This work demonstrates that HTA is a simple and effective way to achieve wafer-scale crystalline h-BN films, which have numerous potential applications in next-generation two-dimensional devices and flexible III-nitride optoelectronic devices.