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The fabrication of a single-crystal hydrogen-terminated diamond metal-oxide-semiconductor field-effect transistor (MOSFET) with HfSiON/Al2O3 bilayer dielectric has been carried out. HfSiON and Al2O... Click to show full abstract
The fabrication of a single-crystal hydrogen-terminated diamond metal-oxide-semiconductor field-effect transistor (MOSFET) with HfSiON/Al2O3 bilayer dielectric has been carried out. HfSiON and Al2O...
Keywords:
hydrogen terminated;
terminated diamond;
hfsion;
effect transistor;
hfsion al2o3;
field effect
Journal Title: AIP Advances
Year Published: 2020
Link to full text (if available)
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Journal Title: AIP Advances
Year Published: 2020
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!