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Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires

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We report on the extended infrared single-photon response of niobium nitride superconducting nanowires deposited by atomic layer deposition. The superconducting nanowire single-photon detectors are based on 4.65 nm thick NbN, patterned… Click to show full abstract

We report on the extended infrared single-photon response of niobium nitride superconducting nanowires deposited by atomic layer deposition. The superconducting nanowire single-photon detectors are based on 4.65 nm thick NbN, patterned into 100 nm meanders, and characterized at 2.5 K. We verify single-photon sensitivity from 1310 to 2006 nm with saturated response at shorter wavelengths.

Keywords: photon sensitivity; photon; atomic layer; infrared single; superconducting nanowires; single photon

Journal Title: Applied Physics Letters
Year Published: 2021

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