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Tom A. W. Wolterink, Robin D. Buijs, Giampiero Gerini, 3 Ewold Verhagen, and A. Femius Koenderink a) Center for Nanophotonics, AMOLF, Science Park 104, 1098XG Amsterdam, The Netherlands Optics Department,… Click to show full abstract
Tom A. W. Wolterink, Robin D. Buijs, Giampiero Gerini, 3 Ewold Verhagen, and A. Femius Koenderink a) Center for Nanophotonics, AMOLF, Science Park 104, 1098XG Amsterdam, The Netherlands Optics Department, Netherlands Organization for Applied Scientific Research (TNO), Stieltjesweg 1, 2628CK Delft, The Netherlands Department of Electrical Engineering, Technische Universiteit Eindhoven (TU/e), 5600 MB Eindhoven, The Netherlands
Keywords:
sensing minimal;
footprint targets;
minimal footprint;
based overlay;
overlay sensing;
calibration based
Journal Title: Applied Physics Letters
Year Published: 2021
Link to full text (if available)
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Journal Title: Applied Physics Letters
Year Published: 2021
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!