LAUSR

Abstract The performance of the hydrophilic diamond fixed-abrasive lapping pad has great effects on successive lapping quality. In this research, orthogonal experiment method was applied to research the effects of processing parameters (the workpiece material, the applied load, the platen speed and the slurry flow rate) on the successive lapping performance of diamond fixed-abrasive pad at each stage, with the evaluation indexes of material removal rate (MRR) and MRR retention rate. The results indicate that: the MRR and the successive lapping ability of hydrophilic fixed-abrasive pad are affected by the workpiece material and the applied load significantly. This research provides the guidance for the successive and stable processing of various materials.