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Preparation of photo-crosslinkable acrylic copolymer and its debonding property on silicon wafer

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As silicon wafers become thinner and easier to warp, it is important to improve production efficiency of dies. In the wafer grinding and dicing process, photo-crosslinkable pressure sensitive adhes... Click to show full abstract

As silicon wafers become thinner and easier to warp, it is important to improve production efficiency of dies. In the wafer grinding and dicing process, photo-crosslinkable pressure sensitive adhes...

Keywords: photo crosslinkable; crosslinkable acrylic; acrylic copolymer; silicon; preparation photo

Journal Title: Journal of Adhesion Science and Technology
Year Published: 2021

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