LAUSR

ABSTRACT The thermodynamic properties of the nanocrystalline CdSe (nc-CdSe) thin film were studied by in situ high-temperature X-ray diffraction measurement over the temperature range 288–1073 K. It is shown that nc-CdSe thin film has high thermal stability and no phase transformation up to 1002 K. Lattice parameter, thermal expansion coefficients along c-axis and crystal quality increased with the increase of temperature, but dislocation density and strain decreased with the increase of temperature. Surface effect and size effect are two of the most specific intrinsic properties of nc-CdSe thin films, both of which are of great significance to the thermodynamic properties. This work has provided a reliable basis for the research of nc-CdSe devices at high temperature.