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Fin Angle Variation Oriented Threshold Voltage Model for a FDSOI FinFET

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To support the current level of integration beyond 22 nm, the FinFET architecture is introduced with the expectation of greater levels of device matching. An additional mechanism, arising from char... Click to show full abstract

To support the current level of integration beyond 22 nm, the FinFET architecture is introduced with the expectation of greater levels of device matching. An additional mechanism, arising from char...

Keywords: angle variation; voltage model; threshold voltage; variation oriented; oriented threshold; fin angle

Journal Title: IETE Journal of Research
Year Published: 2019

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