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Study on Design Optimization of a Symmetry Two-Axis Tilt Angle Capacitive Sensor

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This paper presents the design, optimization, fabrication and characterization of a symmetrical two-axis tilt angle sensor. The sensor consists of a globe-calotte-shaped excitation electrode and tw... Click to show full abstract

This paper presents the design, optimization, fabrication and characterization of a symmetrical two-axis tilt angle sensor. The sensor consists of a globe-calotte-shaped excitation electrode and tw...

Keywords: two axis; axis tilt; tilt angle; design optimization; sensor

Journal Title: Iete Journal of Research
Year Published: 2020

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