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Design and testing of a compliant mechanism-based XYθ stage for micro/nanopositioning

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A compliant mechanism-based micro/nanopositioning stages are used to perform high precision motion in various fields. In recent years, researches proposed various methods to achieve the compliant m... Click to show full abstract

A compliant mechanism-based micro/nanopositioning stages are used to perform high precision motion in various fields. In recent years, researches proposed various methods to achieve the compliant m...

Keywords: mechanism based; micro nanopositioning; compliant mechanism

Journal Title: Australian journal of mechanical engineering
Year Published: 2020

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