Photo from wikipedia
ABSTRACT The mathematical model of a coupled probe-membrane system subjected to electrostatic force is constructed. It is different than the conventional nano/micro actuator, which is constructed by two independent fixed/mobile… Click to show full abstract
ABSTRACT The mathematical model of a coupled probe-membrane system subjected to electrostatic force is constructed. It is different than the conventional nano/micro actuator, which is constructed by two independent fixed/mobile conducting electrodes. The formula of pull-in voltage for different membranes is presented. The effects of several parameters on the pull-in instability are studied. The analytical method for the coupled vibration is proposed. The effects of the probe tips and several differential boundary conditions of membranes on the coupled characteristics are investigated. The coupled characteristic mechanism is clearly described.
Journal Title: Mechanics of Advanced Materials and Structures
Year Published: 2018
Link to full text (if available)
Share on Social Media: Sign Up to like & get
recommendations!