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ABSTRACT Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale… Click to show full abstract
ABSTRACT Vertical type probe is made by microelectromechanical system (MEMS) process in microscale for high degree of integration and performance. To design reliable probe before manufacturing, mechanical properties in microscale is needed. Also, manufactured probe is heat-treated to release residual stress. In this paper, to understand mechanical properties and heat treatment effect in microscale, tensile tests for Ni–Co alloy thin film is performed using specimen with heat-treated under air. The Ni–Co thin film has some enhanced mechanical properties by heat effect and becomes brittle. The changes of grain size distribution and grain direction are observed through electron back-scattered diffraction (EBSD).
Journal Title: Mechanics of Advanced Materials and Structures
Year Published: 2019
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