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National Natural Science Foundation of China [51675304, 11572173]; Beijing Science and Technology Program [Z151100003315008]; National Program on Key Basic Research Project [2013CB934200]; Cyrus Tang Foundation Click to show full abstract
National Natural Science Foundation of China [51675304, 11572173]; Beijing Science and Technology Program [Z151100003315008]; National Program on Key Basic Research Project [2013CB934200]; Cyrus Tang Foundation
Keywords:
force sensors;
alone differential;
differential capacitance;
capacitance force;
stand alone;
sensors sub
Journal Title: Journal of Micromechanics and Microengineering
Year Published: 2017
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Journal Title: Journal of Micromechanics and Microengineering
Year Published: 2017
Link to full text (if available)
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recommendations!