LAUSR

As a main component, membrane micropumps play a key role in developing microfluidic systems. This part pumps fluids by deflecting a membrane using a micro-actuator with a deflection range of a few micrometers during a few seconds. Most electromagnetic micropumps have low lifetime and fracture toughness or low recovery speed. Micropumps with metallic mass-spring structures can overcome the mentioned disadvantages or limitations. This study investigated the fabrication and characterization of a novel electromagnetic micropump. The proposed micropump consists of a stainless-steel mass-spring structure, a polydimethylsiloxane body and membrane, a permanent NdFeB magnet, a micro-coil, and a 3D printed spacer. To characterize the micropump, the effects of the frequency and duty cycle of the electric current applied to the micro-coil on the micropump flow rate and the membrane deflection vs. time were investigated. A membrane deflection of ±8 µm was obtained in 4 s by applying 1000 mA electrical current to the micro-coil. The maximum volumetric flow rate of 523 nl s−1 was obtained at a frequency of 125 mHz and a duty cycle of 50%. The von Mises stress distribution in the micropump membrane and variations of the fluid velocity in the microchannels were analyzed using the finite element method.