LAUSR

A highly sensitive nanoscale mass sensor was developed for weight measurement of single microparticle using suspended graphene structure. The sensor is composed of an array of holes covered with suspended monolayer graphene. Based on the shift of 2D Raman peak in graphene, originated from elongation of carbon-carbon bonds under pressure, the mass of microparticle on suspended graphene can be measured. The results show the sensor can detect microparticle with mass range from 0.1 ng to 3 ng. The peak shift ratio is -69.8 cm-1 per 1% strain for experiment value and -72.3 cm-1 per 1% strain for calculated value. The demonstrated concept presents a promising path for nano-mass measurement applications.